Recognition and Imaging of Point Defect Diffusion, Recombination, and Reaction During Growth of Czochralski-Silicon Crystals

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ژورنال

عنوان ژورنال: Journal of Electronic Materials

سال: 2020

ISSN: 0361-5235,1543-186X

DOI: 10.1007/s11664-020-08203-w